C03800 - SEMI C38 - Guide for Phosphorus Oxychloride StdPbc-1121 The geometry of some patterns

The geometry of some patterns revealed by this Practice suggests that they are related to the crystal growth process while others seem related to surface preparation or thermal cycling conditions

作業監督者

本ガイドは，通常，半導体製造プロセス用の液体プロセス化学薬品配管システムにおいて見出される構成部品について適用する。以下の一覧は適用範囲に含まれる構成部品であるが，すべてを網羅している訳ではない。

This Document specifies the critical dimensions and locations of the kinematic coupling pins (KCPs) that will support and position the 450 mm carriers

C03800 - SEMI C38 - Guide for Phosphorus Oxychloride StdPbc-1121 The geometry of some patternsNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. 1 Purpose 1. 1 The purpose of this Standard is to provide a guide for a grade of phosphorus oxychloride for which a need has been identified. 2 Scope 2. 1 This Standard lists the proposed impurity limits of phosphorus