C00343 - SEMI C3.43 - Standard for Hydrogen Fluoride (HF), Anhydrous (Provisional) StdTpc-Process Chemicals - Precursors and/or mechanical process

and/or mechanical process

SEMI D19-0299E (editorial revision)

It should be noted that the following list of criteria was considered when determining the specified analytical method: Reliability

but not exclusively

C00343 - SEMI C3.43 - Standard for Hydrogen Fluoride (HF), Anhydrous (Provisional) StdTpc-Process Chemicals - Precursors and/or mechanical processThis Standard was technically approved by the Gases Global Technical Committee. Available at www. semi. org in July 2001; originally published in 1990. NOTICE: This Document was balloted and approved for withdrawal in 2001. Hydrogen fluoride is a highly toxic, irritating and corrosive gas with a sharp, pungent odor. It is colorless and nonflammable, but reacts violently with most organic materials. Referenced SEMI Standards None.