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MF152700 - SEMI MF1527 - Guide for Application of Certified Reference Materials and Reference Wafers for Calibration and Control of Instruments for Measuring Resistivity of Silicon StdPbc-0920 SEMI F20 — Specification forThis Guide covers the application of certified reference materials (CRMs) for resistivity measurements on silicon wafers. Specifically, this Guide covers the use of these CRMs for preparing resistivity reference wafers and for ensuring the quality of the instrumentation used for preparing them. The Guide covers the selection of materials for resistivity reference wafers, procedures for preparing and calibrating resistivity reference wafers, and use of