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26-94 (technical revision)
1 It is the intent of this Standard to provide radio frequency (RF) power-delivery system specifications for semiconductor processing equipment that leads to improved system and subsystem performance
This Standard focuses on defining PCS capabilities
1-0224 (technical revision)
PV05500 - SEMI PV55 - Data Definition Specification for a Horizontal Communication Between Equipment for Photovoltaic Fabrication System StdPbc-0820 26-94 (technical revision)NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. The purpose of this Specification is to define a standard description of data, to be exchanged on an interface for horizontal communication between adjacent PV equipment. XML and XML schemas are common and widely used