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This Safety Guideline applies to wafer handling robots and load ports that are being evaluated independently of SME
This Standard is intended for use by equipment suppliers
2 megapascals (MPa) [29 pounds per square inch (psi)] back pressure
SEMI G94-0113 (Reapproved 1123)
M02200 - SEMI M22 - Specification for Dielectrically Isolated (DI) Wafers StdTpc-Minienvironments This Safety Guideline applies toThis standard was technically approved by the global Silicon Wafer Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on November 21, 2006. It was available at www. semi. org in February 2007. Originally published in 1992; previously published March 2003. NOTICE: This document was balloted and approved for withdrawal in 2007. Dielectrically isolated (DI) wafers are used for fabricating specialized