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F07800 - SEMI F78 - Practice for Gas Tungsten Arc (GTA) Welding of Fluid Distribution Systems in Semiconductor Manufacturing Applications StdPbc-1115 The scope of this Document

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The scope of this Document covers grades of 1

4である。

7  The edge roundness parameters are evaluated independent of the test method

Process technology used in the manufacture of semiconductors and electronic devices continues to achieve increases in active feature density and device complexity

F07800 - SEMI F78 - Practice for Gas Tungsten Arc (GTA) Welding of Fluid Distribution Systems in Semiconductor Manufacturing Applications StdPbc-1115 The scope of this Document1 Purpose 1. 1 The purpose of this Practice is to provide procedures for welding stainless steels and other corrosion resistant metals and alloys (CRAs) for fluid (liquid or gas) distribution systems in semiconductor manufacturing applications. Welds performed following these procedures are of sufficient quality to provide the required system purity, weld integrity, and weld strength for use in semiconductor manufacturing applications. 2 Scope 2. 1

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