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本仕様は太陽光（PV）電池の製造に使用されるシリコンウェーハの要求事項について述べている。
SEMI S22-0709 (technical revision)
Similar requirements covering 300 mm AMHS intrabay equipment are covered in SEMI E15
18 — Specification for Sensor/Actuator Specific Device Model for Vacuum Pump Device
E03500 - SEMI E35 - 半導体製造装置のCOO測定方法の計算ガイド StdPbc-0120 本仕様は太陽光（PV）電池の製造に使用されるシリコンウェーハの要求事項について述べている。global Metrics Technical Committee20111224global Audits and Reviews Subcommittee20123www. semiviews. org www. semi. org199520073 COOcomprehensive cost of ownershipCOOconstrained cost of ownershipCOOmonitor cost of ownershipEHS ICFPDPVMEMSLEDHB LEDHDD COO COO Referenced SEMI Standards SEMI E10 Specification for Definition and Measurement of Equipment Reliability, Availability, and Maintainability (RAM) and Utilization SEMI E81 Provisional Specification