D03800 - SEMI D38 - Guide for Quality Area of Flat Panel Display (FPD) Masks Revision:SEMI D38-0211 - Superseded This Standard attempts to be

This Standard attempts to be protocol independent

SEMI E125-0923 (technical revision)

associated with its use

The scope of this Document is limited to the definition of principles for handling reticles and other EES items within a specially designated controlled environment and recommendation of an appropriate level of electric field to maintain within that environment

D03800 - SEMI D38 - Guide for Quality Area of Flat Panel Display (FPD) Masks Revision:SEMI D38-0211 - Superseded This Standard attempts to beThis Guide defines the quality area of FPD masks. This Guide applies to masks that are principally used in fabricating flat panel displays. The mask size specifies range from 202. 8 mm 202. 8 mm to 1620 mm 1780 mm. Substrates with an edge length less than 200 mm follow the specifications for a semiconductor mask (refer to SEMI P1). Referenced SEMI Standards (purchase separately) SEMI D6 Specification for Flat Panel Display (FPD) Mask Substrates SEMI