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previously published November 2009
SEMI E121-0703 (technical revision)
processing may be specified in terms of either material type
and bare reticle stocker equipment
D06600 - SEMI D66 - Terminology for Plastic Substrates of Flexible Display StdPbc-0823 previously published November 20091 Purpose 1. 1 In this Standard, definition and interpretation of each term provides characteristics of materials used for flexible display manufacturing. This Standard benefits unification of terminology generally used for plastic substrates of flexible display manufacturing. 2 Scope 2. 1 This Standard is applicable for plastic substrates of flexible display manufacturing. It covers terminology related to plastic substrates of flexible display, used