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SEMI M54 — Guide for Semi-Insulating (SI) GaAs Material Parameters
3 A simple tuning mechanism is provided for limited feedforward and feedback control between process steps
GLOBALFOUNDRIES
If wafer and stage cleanness is maintained
MF004300 - SEMI MF43 - Test Method for Resistivity of Semiconductor Materials StdPbc-0320 SEMI M54 — Guide forThe resistivity of a semiconductor material is an important materials acceptance requirement. Resistivity determinations made during device fabrication are also widely used for quality control purposes. This Test Method covers two procedures which are widely used for making routine measurements. The two test methods in this Standard are as follows: Method A, Two Probe and Method B, Four Probe. In general, resistivity measurements are most reliable