SEMI M45 — Provisional Specification for 300 mm Shipping System
The Guide provides criteria for selection of instruments for determining the resistivity of silicon resistivity reference materials
and material acceptance purposes
Maximum allowable slip and other non-uniformly distributed defects are frequently specified when procuring polished and epitaxial silicon wafers
E08400 - SEMI E84 - 캐리어 핸드오프 병렬 I/O 인터페이스 강화 사양 Lang-Chinese (Traditional) SEMI M45 — Provisional SpecificationGlobal Physical Interfaces & Carriers Committee , 2009 9 4 Global Audits and Reviews Subcommittee . 1999 6 , 2007 11 . 2009 10 www. semi. org . , FOUP (open cassettes) (carrier) (AMHS) . AMHS (PI O) (control) (carrier) (handoff) ( ) . (carrier) SEMI E23 I O . (handoff), (handoff) , . (, AGV, RGV OHT AMHS ) (, ; ) (handoff) , (interbay) AMHS (, OHS ) (, OHS ) . AMHS (handoff) (carrier) I O . Figure 1 2 AHMS . (carrier) (handoff) I O : ( 6. 1) (carrier)