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SEMI E109-1017 (Reapproved 0623)
they are only used for limited types of Mura and are not practical in real varied cases
本仕様は，二次元のコードシンボルとそれに関連する英数字（読取用カメラとディスプレイで読み取り可能なもの）から成り，
キャリア
E01501 - SEMI E15.1 - Specification for 300 mm Tool Load Port StdPbc-0318 SEMI E109-1017 (Reapproved 0623)NOTICE: This Standard or Safety Guideline has Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. This Specification defines dimensional requirements for the load ports of 300 mm wafer process and inspection equipment. It is intended to promote a uniform physical interface between equipment and the factory, to facilitate
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