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If present
適用於本指引的溫室氣體(GHG)為CF4，C2F6，C3F8，c-C4F8，CHF3，SF6與NF3。
SEMI MF84 — Test Method for Measuring Resistivity of Silicon Slices with a Collinear Four-Probe Array
SEMI M60 is GOI metrology based on time dependent dielectric breakdown (TDDB) method
F09900 - SEMI F99 - Dimensional Specification of a Diaphragm Valve for a Metric PFA Tube StdVol-3D-IC If presentThis specification was technically approved by the Global Liquid Chemicals Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on March 11, 2005. It was available at www. semi. org in June 2005. NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to
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