E00109 - SEMI E1.9 - Mechanical Specification for Cassettes Used to Transport and Store 300 mm Wafers StdPbc-0115 SEMI M43 — Guide for

SEMI M43 — Guide for Reporting Wafer Nanotopography

SEMI G32 — Guideline for Unencapsulated Thermal Test Chip

This places a burden on the capabilities of transport modules to move wafers to and from various modules in a cluster tool

If the spectrophotometer is calibrated using 2 mm thick double side polished CRMs

E00109 - SEMI E1.9 - Mechanical Specification for Cassettes Used to Transport and Store 300 mm Wafers StdPbc-0115 SEMI M43 — Guide forNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. This Standard specifies the cassettes used to transport and store 300 mm wafers in an IC manufacturing facility. This includes both manual and auto transport use as well as high speed extraction of the wafers in processing