C04000 - SEMI C40 - 水酸化カリウム45%溶液の仕様 Revision:SEMI C40-1110 - Superseded SEMI MF1529-02 (first SEMI publication)

Name: C04000 - SEMI C40 - 水酸化カリウム45%溶液の仕様 Revision:SEMI C40-1110 - Superseded SEMI MF1529-02 (first SEMI publication)
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Description

SEMI MF1529-02 (first SEMI publication)

NOTICE: This Standard was balloted and approved for withdrawal in 2022

This specification provides guidelines for the design and acceptance of metal lid/preform assemblies

シリコンエピタキシャルウェーハの中には，エピタキシャル層の下に埋め込み層が形成されているものがある。本仕様はそのような埋め込み層付きのエピタキシャルウェーハの特性について規定するものである。

C04000 - SEMI C40 - 水酸化カリウム45%溶液の仕様 Revision:SEMI C40-1110 - Superseded SEMI MF1529-02 (first SEMI publication)global Liquid Chemicals Committeeglobal Audits and Reviews Subcommittee2010827201010www. semi. org1978200511 45 % Referenced SEMI Standards SEMI C1 Guide for the Analysis of Liquid Chemicals

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