M03500 - SEMI M35 - 自動検査により検出されるシリコンウェーハ表面特性の仕様を開発するためのガイド Revision:SEMI M35-1107 - Superseded This desired characteristic is generally

This desired characteristic is generally known as electromagnetic compatibility (EMC)

SEMI E33-0217 (technical revision)

SEMI D65-0719 (technical revision)

SEMI MF1569-0307 (Reapproved 0512)

M03500 - SEMI M35 - 自動検査により検出されるシリコンウェーハ表面特性の仕様を開発するためのガイド Revision:SEMI M35-1107 - Superseded This desired characteristic is generallyglobal Silicon Wafer Committee200795global Audits and Reviews Subcommittee200710www. semi. org200711CD ROM19992200511 SSISscanning surface inspection systems Referenced SEMI Standards SEMI M1 Specifications for Polished Monocrystalline Polished Silicon Wafers SEMI M53 Practice for Calibrating Scanning Surface Inspection Systems using Depositions of Monodisperse Polystyrene Latex Sphere on Unpatterned Semiconductor Wafer Surfaces