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(Table R1-1)
it is anticipated that most device manufacturers will require most of the GEM capabilities that apply to a particular type of equipment
SEMI E132-0305 (designation update)
このガイドは，スキャニング（または自動の）表面検査システム（SSIS：scanning surface inspection systems）を用いてシリコンウェーハの表面特性測定を記録するための仕様の枠組みを提供する。
M00800 - SEMI M8 - Specification for Polished Monocrystalline Silicon Test Wafers Revision:SEMI M8-0312 (Reapproved 1023) - Current (Table R1-1)This Specification covers dimensional and crystallographic properties of monocrystalline virgin silicon test wafers together with selected electrical and surface defect characteristics. This Specification covers virgin test wafers in all standard wafer diameters from 2 inch to 300 mm. It classifies test wafers according to the items specified. It provides three classes of smaller diameter test wafers (through 125 mm), and two classes of larger
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